Concepedia
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Publications
1
Citations
23
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Active since
2012
Manabu Yoshii is an author specializing in silicon, interconnect design, and etching processes.
Publications per year
2012–2012
A novel scallop free TSV etching method in magnetic neutral loop discharge plasma
Yasuhiro Morikawa, Takahide Murayama, Toshiyuki Sakuishi et al. · 2012 · 23 citations
Engineering, Electrical Engineering, Microelectronics +16
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