Concepedia

Neal P. Callan

NP

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Publications

2

Citations

61

H-Index

2

Active since

2008

Affiliations

ASML (Netherlands)(Current)

Neal P. Callan is an author at ASML (Netherlands) specializing in engineering, systems engineering, and computer engineering.

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Publications per year

2008–2016

2

Publications

2

An innovative Source-Mask co-Optimization (SMO) method for extending low k1 imaging

Stephen Hsu, Luoqi Chen, Zhipan Li et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 50 citations

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Process window limiting hot spot monitoring for high-volume manufacturing

M. Jochemsen, Roy Anunciado, Vadim Timoshkov et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 11 citations

, , +18

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