Y. Chen is an author at University of Glasgow specializing in nanotechnology, nanofabrication, and nanolithography.
Top concepts
EngineeringNanotechnologyApplied PhysicsNanoelectronicsNanofabricationNanolithographyMaterial ScienceMicroelectronicsMicrofabricationIntegrated Circuits
Publications per year
2001–2001
1
1
Fabrication of T gate structures by nanoimprint lithography
D.S. Macintyre, Y. Chen, D. R. Lim et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 25 citations
Engineering, Electron-beam Lithography, Pattern Transfer +19
Rows per page
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