Keith Gronlund

An innovative Source-Mask co-Optimization (SMO) method for extending low k1 imaging

Stephen Hsu, Luoqi Chen, Zhipan Li et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 50 citations

Engineering, Computational Design, Design Optimization +12

Fast 3D thick mask model for full-chip EUVL simulations

Peng Liu, Xiaobo Xie, Wei Liu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 32 citations

Engineering, Computer Engineering, Manufacturing Engineering +12

EUV source-mask optimization for 7nm node and beyond

Xiaofeng Liu, Rafael C. Howell, Stephen D. H. Hsu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 28 citations

Engineering, Biomedical Engineering, Biomedical Imaging +10

EUV resolution enhancement techniques (RETs) for k₁0.4 and below

Stephen D. H. Hsu, Rafael C. Howell, Jianjun Jia et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 27 citations

Engineering, Computer Engineering, Electrical Engineering +15

Performance of a programmable illuminator for generation of freeform sources on high NA immersion systems

Melchior Mulder, André Engelen, O.F.J. Noordman et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 24 citations

Natural Sciences, Electrical Engineering, Optical Materials +8