Concepedia

Naoya Hayashi

NH

25

Publications

342

Citations

12

H-Index

1978

Active since

Affiliations

Dai Nippon Printing (Japan)(Current)

Toshiba (Japan)

Intel (United States)

Naoya Hayashi is an author at Dai Nippon Printing (Japan) specializing in engineering, electronic packaging, and microfabrication.

Top concepts

EngineeringMicroelectronicsMicrofabricationElectronic PackagingApplied PhysicsComputer EngineeringElectrical EngineeringOptoelectronicsMaterial Science3D Printing

Publications per year

1978–2016

25

Publications

25

Performance of EBeyeM for EUV mask inspection

Shinji Yamaguchi, Masato Naka, Takashi Hirano et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 29 citations

Engineering, Inspection, Electron-beam Lithography +19

LER transfer from a mask to wafers

Hiroyoshi Tanabe, Ginga Yoshizawa, Yan Liu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 19 citations

Ler Transfer, Wafer Scale Processing, Engineering +15

HVM readiness of nanoimprint lithography templates: defects, CD, and overlay

Koji Ichimura, Kouji Yoshida, Saburo Harada et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 18 citations

Development of EB inspection system EBeyeM for EUV mask

Takashi Hirano, Shinji Yamaguchi, Masato Naka et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 18 citations

Engineering, Inspection, Electron-beam Lithography +20

Formation of Porous Intermetallic Thick Film by Ni-Al Microscopic Reactive Infiltration

Tatsuya Ohmi, Naoya Hayashi, Manabu Iguchi · MATERIALS TRANSACTIONS · 2008 · 18 citations · Full text

Engineering, Nanoporous Material, Mechanical Engineering +19

Rows per page

1–5 of 25