Glen LaVigne

<title>Friction in surface-micromachined microengines</title>

S. L. Miller, Jeffry J. Sniegowski, Glen LaVigne et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1996 · 56 citations · Full text

Engineering, Mechanical Engineering, Microelectromechanical Systems +16

Monolithic Geared-Mechanism Driven by a Polysilicon Surface-MicroMachined On-Chip Electrostatic Microengine

J.J. Sniegowski, S. L. Miller, Glen LaVigne et al. · 1996 · 46 citations · Full text

Engineering, Electrical Engineering, Mechanical Engineering +16

Routes to failure in rotating MEMS devices experiencing sliding friction

S. L. Miller, Glen LaVigne, M.S. Rodgers et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1997 · 34 citations · Full text

Engineering, Mechanical Engineering, Mechatronics Engineering +11

Failure modes in surface micromachined microelectromechanical actuators

S. L. Miller, M.S. Rodgers, Glen LaVigne et al. · 1998 · 33 citations · Full text

Engineering, Materials Science, Mechanical Engineering +17

<title>Performance trade-offs for a surface micromachined microengine</title>

S. L. Miller, Jeffry J. Sniegowski, Glen LaVigne et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1996 · 30 citations

Engineering, Electrical Engineering, Mechanical Engineering +17