Concepedia

John Gumpher

JG

2

Publications

35

Citations

2

H-Index

2003

Active since

Affiliations

Texas Instruments (United States)(Current)

John Gumpher is an author at Texas Instruments (United States) specializing in applied physics, engineering, and chemical engineering.

Top concepts

EngineeringApplied PhysicsChemistrySurface ScienceMaterial ScienceMicroelectronicsMicrofabricationChemical EngineeringComputer EngineeringMaterials Engineering

Publications per year

2003–2004

2

Publications

2

Characterization of Low-Temperature Silicon Nitride LPCVD from Bis(tertiary-butylamino)silane and Ammonia

John Gumpher, Wayne Bather, Narendra Mehta et al. · Journal of The Electrochemical Society · 2004 · 19 citations

Materials Science, Etch Resistance, Chemical Engineering +10

LPCVD silicon nitride uniformity improvement using adaptive real-time temperature control

John Gumpher, Wayne Bather, Darin Wedel · IEEE Transactions on Semiconductor Manufacturing · 2003 · 16 citations

Materials Engineering, Electrical Engineering, Wafer Scale Processing +14

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