Concepedia

Eiji Shidoji

ES

9

Publications

273

Citations

9

H-Index

1994

Active since

Affiliations

Asahi Glass (Japan)(Current)

Keio University

Eiji Shidoji is an author at Asahi Glass (Japan) specializing in engineering, physics, and applied physics.

Top concepts

Publications per year

1994–2012

9

Publications

9

Two-Dimensional Self-Consistent Simulation of a DC Magnetron Discharge

Eiji Shidoji, Hiroto Ohtake, Nobuhiko Nakano et al. · Japanese Journal of Applied Physics · 1999 · 64 citations

, , +12

Three-Dimensional Simulation of Target Erosion in DC Magnetron Sputtering

Eiji Shidoji, Masaharu Nemoto, Takuji Nomura et al. · Japanese Journal of Applied Physics · 1994 · 52 citations

, , +13

Influence of gas pressure and magnetic field upon dc magnetron discharge

Eiji Shidoji, K. F. Ness, Toshiaki Makabe · Vacuum · 2001 · 36 citations

, , +6

An anomalous erosion of a rectangular magnetron system

Eiji Shidoji, Masaharu Nemoto, Takuji Nomura · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 30 citations

, , +10

Numerical simulation of the discharge in d.c. magnetron sputtering

Eiji Shidoji, Nobuhiko Nakano, Toshiaki Makabe · Thin Solid Films · 1999 · 28 citations

, , +6

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