Concepedia

C. Penzkofer

CP

Statistics

Publications

1

Citations

11

H-Index

1

Active since

2012

Affiliations

Commissariat à l'Énergie Atomique et aux Énergies Alternatives(Current)

C. Penzkofer is an author at Commissariat à l'Énergie Atomique et aux Énergies Alternatives specializing in silicon, surface topography mapping, and materials science.

Publications per year

2012–2012

1

Publications

1

Overcoming silicon limitations: new 3D-AFM carbon tips with constantly high-resolution for sub-28nm node semiconductor requirements

J. Foucher, Sebastian Schmidt, C. Penzkofer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 11 citations

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