Concepedia

Hikaru Koyama

HK

Statistics

Publications

1

Citations

40

H-Index

1

Active since

2002

Affiliations

Waseda University(Current)

Hikaru Koyama is an author at Waseda University specializing in electronic materials, secondary electron detectors, and atomic force microscopy analysis.

Publications per year

2002–2002

1

Publications

1

Improvement of Focused Ion-Beam Optics in Single-Ion Implantation for Higher Aiming Precision of One-by-One Doping of Impurity Atoms into Nano-Scale Semiconductor Devices

Takahiro Shinada, Hikaru Koyama, Chie Hinoshita et al. · Japanese Journal of Applied Physics · 2002 · 40 citations

Natural Sciences, Materials Science, Electronic Materials +16

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