Concepedia
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Publications
1
Citations
16
H-Index
Active since
1991
Shohei Koshiba is an author specializing in materials engineering, materials chemistry, and thin film thermal properties.
Publications per year
1991–1991
Application of Penta-Di-Methyl-Amino-Tantalum to a Tantalum Source in Chemical Vapor Deposition of Tantalum Oxide Films
Toshiya Tabuchi, Yoshinori Sawado, Kunimasa Uematsu et al. · Japanese Journal of Applied Physics · 1991 · 16 citations
Natural Sciences, Materials Engineering, Materials Science +16
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