Concepedia

Jim Kennon

JK

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Publications

1

Citations

26

H-Index

1

Active since

2013

Affiliations

Lawrence Berkeley National Laboratory(Current)

Jim Kennon is an author at Lawrence Berkeley National Laboratory specializing in engineering, wavefront error estimation, and electron beam lithography.

Publications per year

2013–2013

1

Publications

1

Projection optics for extreme ultraviolet lithography (EUVL) micro-field exposure tools (METs) with a numerical aperture of 0.5

Holger Glatzel, Dominic Ashworth, Mark Bremer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 26 citations

Engineering, Materials Engineering, Microfabrication +10

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