Concepedia

Shinya Yuki

SY

2

Publications

39

Citations

2

H-Index

2006

Active since

Affiliations

Tohoku University(Current)

Shinya Yuki is an author at Tohoku University specializing in microfabrication, mechanical engineering, and microelectronics.

Top concepts

EngineeringMicroelectronicsMicrofabricationMechanical EngineeringMechatronicsApplied PhysicsMicropositioningElectrical Engineering

Publications per year

2006–2007

2

Publications

2

Performance of Tense Thin-Film Torsion Bar for Large Rotation and Low-Voltage Driving of Micromirror

Minoru Sasaki, Shinya Yuki, Kazuhiro Hane · IEEE Journal of Selected Topics in Quantum Electronics · 2007 · 22 citations

Electrical Engineering, Engineering, Microfabrication +10

Large-rotation and low-voltage driving of micromirror realized by tense thin-film torsion bar

Minoru Sasaki, Shinya Yuki, Kazuhiro Hane · IEEE Photonics Technology Letters · 2006 · 17 citations

Engineering, Mirror Rotation Angle, Microfabrication +9

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