K.A. Drakin

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Active since

1991

Affiliations

Institute of Microelectronics Technology and High Purity Materials(Current)

K.A. Drakin is an author at Institute of Microelectronics Technology and High Purity Materials specializing in silicon materials, oxide semiconductors, and materials science.

Publications per year

1991–1991

Publications

Peculiarities of buried silicon oxynitride layer synthesis by sequential oxygen and nitrogen ion implantation in silicon

A.B. Danilin, K.A. Drakin, V.V. Kukin et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1991 · 16 citations

Natural Sciences, Materials Engineering, Materials Science +17

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