E. N. Zhikharev

Measurement of dimensions of resist mask elements below 100 nm with help of a scanning electron microscope

V. A. Kal’nov, Yu. A. Novikov, A. A. Orlikovsky et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 31 citations

Engineering, Electron-beam Lithography, Microscopy +17

Focused electron beam-induced deposition of iron- and carbon-containing nanostructures from triiron dodecacarbonyl vapor

M.A. Bruk, E. N. Zhikharev, V. A. Kal’nov et al. · High Energy Chemistry · 2005 · 16 citations

Materials Science, Chemical Engineering, Engineering +10

Formation of micro- and nanostructures with well-rounded profile by new e-beam lithography principle

M.A. Bruk, E. N. Zhikharev, A. E. Rogozhin et al. · Microelectronic Engineering · 2016 · 13 citations

Materials Science, Engineering, Electron-beam Lithography +12

Lithium insertion into silicon films produced by magnetron sputtering

Yu. E. Roginskaya, M.A. Bruk, E. N. Zhikharev et al. · Russian Journal of Electrochemistry · 2008 · 11 citations

New type of the nanostructured composite Si/C electrodes

Yu. E. Roginskaya, M.A. Bruk, E. N. Zhikharev et al. · Russian Journal of Electrochemistry · 2008 · 10 citations