Statistics
Publications
2
Citations
25
H-Index
2
Active since
1989
Affiliations
Koichi Ohtaka is an author at Tokyo University of Agriculture and Technology specializing in microfabrication, applied physics, and thin films.
Publications per year
1989–1990
2
2
Microlithographic behavior of transition metal oxide resists exposed to focused ion beam
Nobuyoshi Koshida, Yukio Ichinose, Koichi Ohtaka et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 11 citations
Engineering, Electron-beam Lithography, Ion Beam Instrumentation +16
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