1
Publications
10
Citations
1
H-Index
2005
Active since
Affiliations
Institute of Microelectronics(Current)
S.R. Wang is an author at Institute of Microelectronics.
Publications per year
2005–2005
1
1
Impact of electroplated copper thickness on copper CMP and Cu/Coral™ BEOL integration
C. H. Seah, Ge‐Yun You, S.R. Wang et al. · Microelectronic Engineering · 2005 · 10 citations
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