Yuji Sugino

Thermal stress analysis of silicon bulk single crystal during Czochralski growth

Nobuyuki Miyazaki, Hiroyuki Uchida, Tsuyoshi Munakata et al. · Journal of Crystal Growth · 1992 · 71 citations

Engineering, Materials Engineering, Materials Science +16

Dependence of Warpage of Czochralski-Grown Silicon Wafers on Oxygen Concentration and Its Application to MOS Image-Sensor Device

Hirofumi Shimizu, Masato Fujita, Takaaki Aoshima et al. · Japanese Journal of Applied Physics · 1986 · 19 citations

Engineering, Electrical Engineering, Materials Science +17

Excellence of Gate Oxide Integrity in Metal-Oxide-Semiconductor Large-Scale-Integrated Circuits Based on P^-/P^-Thin-Film Epitaxial Silicon Wafers

Hirofumi Shimizu, Yuji Sugino, Norio Suzuki et al. · Japanese Journal of Applied Physics · 1997 · 14 citations

Engineering, Electrical Engineering, Materials Science +17