Ekaterina Zoubenko

Thickness dependence of the physical properties of atomic-layer deposited Al2O3

Yael Etinger-Geller, Ekaterina Zoubenko, Maria Baskin et al. · Journal of Applied Physics · 2019 · 26 citations · Full text

Natural Sciences, Materials Science, Physics +17

Obtaining low resistivity (∼100 <i>μ</i>Ω cm) TiN films by plasma enhanced atomic layer deposition using a metalorganic precursor

Igor Krylov, Ekaterina Zoubenko, Kamira Weinfeld et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2018 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +17

Role of reactive gas on the structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition

Igor Krylov, Xianbin Xu, Ekaterina Zoubenko et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2018 · 16 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +16

Impact of chemical bonding difference of ALD Mo on SiO2 and Al2O3 on the effective work function of the two gate stacks

Ekaterina Zoubenko, Sara Iacopetti, Kamira Weinfeld et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2021 · 10 citations

Engineering, Materials Engineering, Materials Science +17