Concepedia

Shumin Yang

SY

Statistics

Publications

15

Citations

285

H-Index

12

Active since

2008

Affiliations

Chinese Academy of Sciences(Current)

Shanghai Institute of Applied Physics

Shanghai Advanced Research Institute

University of Chinese Academy of Sciences

Shanghai Synchrotron Radiation Facility

Shumin Yang is an author at Chinese Academy of Sciences specializing in materials science, materials engineering, and engineering.

Publications per year

2008–2022

15

Publications

15

Molecular Glass Resists Based on 9,9′-Spirobifluorene Derivatives: Pendant Effect and Comprehensive Evaluation in Extreme Ultraviolet Lithography

Qingshan Hao, Shuangqing Wang, Shayu Li et al. · ACS Applied Polymer Materials · 2019 · 46 citations

Natural Sciences, Materials Engineering, Materials Science +14

Diamond films with preferred <110> texture by hot filament CVD at low pressure

Shumin Yang, Zhoutong He, Qintao Li et al. · Diamond and Related Materials · 2008 · 32 citations

Natural Sciences, Materials Engineering, Materials Science +6

The recent development of soft x-ray interference lithography in SSRF

Jun Zhao, Shumin Yang, Chaofan Xue et al. · International Journal of Extreme Manufacturing · 2020 · 28 citations · Full text

Natural Sciences, Materials Science, Biomedical Optics +12

Molecular Glass Resists Based on Tetraphenylsilane Derivatives: Effect of Protecting Ratios on Advanced Lithography

Yake Wang, Yi Zeng, Tianjun Yu et al. · ACS Omega · 2022 · 24 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +13

Fabrication of large-area high-aspect-ratio periodic nanostructures on various substrates by soft X-ray interference lithography

Chaofan Xue, Jun Zhao, Yanqing Wu et al. · Applied Surface Science · 2017 · 23 citations

Engineering, Materials Engineering, Materials Science +12

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