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Matt Chidley

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Publications

1

Citations

12

H-Index

1

Active since

2002

Affiliations

Oak Ridge National Laboratory(Current)

Matt Chidley is an author at Oak Ridge National Laboratory specializing in education, instrumentation, and technology.

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Publications per year

2002–2002

1

Publications

1

<title>Direct to digital holography for semiconductor wafer defect detection and review</title>

C. E. Thomas, Tracy M. Bahm, L. R. Baylor et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 12 citations

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