Concepedia
Statistics
Publications
2
Citations
60
H-Index
Active since
2006
Affiliations
Centre National de la Recherche Scientifique(Current)
CEA Grenoble
Commissariat à l'Énergie Atomique et aux Énergies Alternatives
A. Le Gouil is an author at Centre National de la Recherche Scientifique specializing in engineering, plasma etching, and etching.
Publications per year
2006–2007
Poly-Si∕TiN∕HfO2 gate stack etching in high-density plasmas
A. Le Gouil, O. Joubert, G. Cunge et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 45 citations
Engineering, Electrical Engineering, Materials Science +17
Chemical analysis of deposits formed on the reactor walls during silicon and metal gate etching processes
A. Le Gouil, E. Pargon, G. Cunge et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 15 citations
Engineering, Materials Engineering, Materials Science +17
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