Statistics
Publications
1
Citations
11
H-Index
1
Active since
2013
Affiliations
Tokyo Electron (Japan)(Current)
Masaya Nagasaka is an author at Tokyo Electron (Japan) specializing in process temperature effects, materials engineering, and semiconductor thin films.
Publications per year
2013–2013
1
1
Evaluation of Stress Induced by Plasma Assisted ALD SiN Film
Kohki Nagata, Masaya Nagasaka, Takuya Yamaguchi et al. · ECS Transactions · 2013 · 11 citations
Natural Sciences, Materials Engineering, Materials Science +17
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