Concepedia

Author

Ryou Uozumi

Tokyo University of Science

Also Known As

Ryou Uozumi

2

Publications

14

Citations

1

H-Index

9

Concepts

All Affiliations

Tokyo University of Science
RU

About

Ryou Uozumi is an author at Tokyo University of Science specializing in microfabrication, ion beam physics, and instrumentation.

Top Concepts

#ConceptH-IndexPublicationsCitations

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Engineering

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Applied Physics

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Electrical Engineering

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Mechanical Engineering

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Instrumentation

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Ryou Uozumi

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1

Publications

13

Citations

1

H-Index

YearCitations

Evaluation of surface roughness of Zerodur® substrates machined by Ar+ ion beam with energy of 3–10keV

Yuichi Kurashima, Ryou Uozumi, Iwao Miyamoto,

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

2007

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