Concepedia

J.-S. Jenq

JJ

3

Publications

171

Citations

3

H-Index

1993

Active since

Affiliations

University of Wisconsin–Madison(Current)

J.-S. Jenq is an author at University of Wisconsin–Madison specializing in physics, applied physics, and engineering.

Top concepts

Publications per year

1993–1994

3

Publications

3

Absolute fluorine atom concentrations in RIE and ECR CF<sub>4</sub>plasmas measured by actinometry

J.-S. Jenq, Ji Cheng Ding, James W. Taylor et al. · Plasma Sources Science and Technology · 1994 · 81 citations

, , +16

Etching rate characterization of SiO2 and Si using ion energy flux and atomic fluorine density in a CF4/O2/Ar electron cyclotron resonance plasma

Ji Cheng Ding, J.-S. Jenq, Gon‐Ho Kim et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 73 citations

, , +13

Experiments with back side gas cooling using an electrostatic wafer holder in an electron cyclotron resonance etching tool

J. A. Meyer, K. H. R. Kirmse, J.-S. Jenq et al. · Applied Physics Letters · 1994 · 17 citations

, , +17

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