1b:I[776749,["/_next/static/chunks/c97efd7440d9bd83.js","/_next/static/chunks/cade25408804e153.js","/_next/static/chunks/4b78a33ddbd7188c.js","/_next/static/chunks/da883ec1c2f0eed1.js","/_next/static/chunks/25ca49077b5926af.js","/_next/static/chunks/44ffa090c2b6b4f9.js","/_next/static/chunks/422ef944f0761271.js"],"default"] 1c:I[303486,["/_next/static/chunks/c97efd7440d9bd83.js","/_next/static/chunks/cade25408804e153.js","/_next/static/chunks/4b78a33ddbd7188c.js","/_next/static/chunks/da883ec1c2f0eed1.js","/_next/static/chunks/25ca49077b5926af.js","/_next/static/chunks/44ffa090c2b6b4f9.js","/_next/static/chunks/422ef944f0761271.js"],"default"] 1d:I[341892,["/_next/static/chunks/c97efd7440d9bd83.js","/_next/static/chunks/cade25408804e153.js","/_next/static/chunks/4b78a33ddbd7188c.js","/_next/static/chunks/da883ec1c2f0eed1.js","/_next/static/chunks/25ca49077b5926af.js","/_next/static/chunks/44ffa090c2b6b4f9.js","/_next/static/chunks/422ef944f0761271.js"],"default"] 1e:I[617707,["/_next/static/chunks/c97efd7440d9bd83.js","/_next/static/chunks/cade25408804e153.js","/_next/static/chunks/4b78a33ddbd7188c.js","/_next/static/chunks/da883ec1c2f0eed1.js","/_next/static/chunks/25ca49077b5926af.js","/_next/static/chunks/44ffa090c2b6b4f9.js","/_next/static/chunks/422ef944f0761271.js"],"default"] 1f:I[866528,["/_next/static/chunks/c97efd7440d9bd83.js","/_next/static/chunks/cade25408804e153.js","/_next/static/chunks/4b78a33ddbd7188c.js","/_next/static/chunks/da883ec1c2f0eed1.js","/_next/static/chunks/25ca49077b5926af.js","/_next/static/chunks/44ffa090c2b6b4f9.js","/_next/static/chunks/422ef944f0761271.js"],"default"] 20:I[963176,["/_next/static/chunks/c97efd7440d9bd83.js","/_next/static/chunks/cade25408804e153.js","/_next/static/chunks/4b78a33ddbd7188c.js","/_next/static/chunks/da883ec1c2f0eed1.js","/_next/static/chunks/25ca49077b5926af.js","/_next/static/chunks/44ffa090c2b6b4f9.js","/_next/static/chunks/422ef944f0761271.js"],"default"] 21:I[987099,["/_next/static/chunks/c97efd7440d9bd83.js","/_next/static/chunks/cade25408804e153.js","/_next/static/chunks/4b78a33ddbd7188c.js","/_next/static/chunks/da883ec1c2f0eed1.js","/_next/static/chunks/25ca49077b5926af.js","/_next/static/chunks/44ffa090c2b6b4f9.js","/_next/static/chunks/422ef944f0761271.js"],"default"] 22:I[226200,["/_next/static/chunks/c97efd7440d9bd83.js","/_next/static/chunks/cade25408804e153.js","/_next/static/chunks/4b78a33ddbd7188c.js","/_next/static/chunks/da883ec1c2f0eed1.js","/_next/static/chunks/25ca49077b5926af.js","/_next/static/chunks/44ffa090c2b6b4f9.js","/_next/static/chunks/422ef944f0761271.js"],"Group"] 23:I[723365,["/_next/static/chunks/c97efd7440d9bd83.js","/_next/static/chunks/cade25408804e153.js","/_next/static/chunks/4b78a33ddbd7188c.js","/_next/static/chunks/da883ec1c2f0eed1.js","/_next/static/chunks/25ca49077b5926af.js","/_next/static/chunks/44ffa090c2b6b4f9.js","/_next/static/chunks/422ef944f0761271.js"],"default"] 24:T4c4,We evaluated diamond metal oxide semiconductor field effect transistors (MOSFETs) on (001) homoepitaxial and (110) preferentially oriented large-grain diamond films with an Al ₂ O ₃ gate insulator and demonstrated their improved DC and RF characteristics (I _DS = -790 mA/mm and f _T = 45 GHz, which are the highest values for diamond FETs). Channel mobility evaluation and load-pull measurement were carried out for the first time for diamond MOSFETs. Even on a large-grain diamond substrate, a high channel mobility of 120 cm ² /Vs was obtained. This is comparable to that of a SiC inversion layer. A power density of 2.14 W/mm was obtained at 1 GHz.

H. Takayanagi

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