Concepedia

Sun-Oo Kim

SK

4

Publications

91

Citations

4

H-Index

1991

Active since

Affiliations

Seoul National University(Current)

Sun-Oo Kim is an author at Seoul National University specializing in applied physics, engineering, and materials science.

Top concepts

Publications per year

1991–1994

4

Publications

4

Fabrication of <i>n</i>-metal–oxide semiconductor field effect transistor with Ta2O5 gate oxide prepared by plasma enhanced metalorganic chemical vapor deposition

Sun-Oo Kim, Hyeong Joon Kim · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 37 citations

, , +13

The effect of substrate temperature on the composition and growth of tantalum oxide thin films deposited by plasma-enhanced chemical vapour deposition

Sun-Oo Kim, Jeong Soo Byun, Hyeong Joon Kim · Thin Solid Films · 1991 · 30 citations

, , +9

The effects of substrate and annealing ambient on the electrical properties of Ta2O5 thin films prepared by plasma enhanced chemical vapor deposition

Sun-Oo Kim, Hyeong Joon Kim · Thin Solid Films · 1994 · 13 citations

, , +10

Comparison of ultrathin SiO2 films grown by thermal oxidation in an N2O ambient with those in a 33% O2/N2 ambient

Sug Bong Kang, Sun-Oo Kim, Jeong-Soo Byun et al. · Applied Physics Letters · 1994 · 11 citations

, , +17

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