Fadi Zoubian

Atmospheric Plasma-Enhanced Spatial Chemical Vapor Deposition of SiO₂ Using Trivinylmethoxysilane and Oxygen Plasma

Việt Hương Nguyễn, Abderrahime Sekkat, César Masse de La Huerta et al. · Chemistry of Materials · 2020 · 31 citations · Full text

Natural Sciences, Chemical Engineering, Materials Engineering +17

Structural and ellipsometric study on tailored optical properties of tantalum oxynitride films deposited by reactive sputtering

A. Bousquet, Fadi Zoubian, J. Cellier et al. · Journal of Physics D Applied Physics · 2014 · 22 citations

Natural Sciences, Materials Engineering, Materials Science +17

Control the Composition of Tantalum Oxynitride Films by Sputtering a Tantalum Target in Ar/<scp>O</scp>₂/<scp>N</scp>₂ Radiofrequency Magnetron Plasmas

A. Bousquet, Fadi Zoubian, J. Cellier et al. · Plasma Processes and Polymers · 2013 · 20 citations

Natural Sciences, Materials Engineering, Materials Science +15

Distributed elementary ECR microwave plasma sources supplied by solid state generators for production of large area plasmas without scale limitation: plasma density measurements and comparison with simulation

Fadi Zoubian, N Renaut, L. Latrasse · Plasma Research Express · 2021 · 12 citations · Full text

Natural Sciences, Electrical Engineering, Physics +14