Takashi Hyakushima

Low temperature grown carbon nanotube interconnects using inner shells by chemical mechanical polishing

Daisuke Yokoyama, Takayuki Iwasaki, Tsuyoshi Yoshida et al. · Applied Physics Letters · 2007 · 108 citations

Nanosheet, Engineering, Carbon Nanotechnology +26

Electrical Properties of Carbon Nanotubes Grown at a Low Temperature for Use as Interconnects

Daisuke Yokoyama, Takayuki Iwasaki, Kentaro Ishimaru et al. · Japanese Journal of Applied Physics · 2008 · 74 citations

Engineering, Electrical Properties, Interconnect (Integrated Circuits) +23

Electrical Properties of Carbon Nanotube Via Interconnects Fabricated by Novel Damascene Process

Mizuhisa Nihei, Takashi Hyakushima, Shintaro Sato et al. · 2007 · 32 citations

Engineering, Conventional Cu Interconnects, Charge Transport +21

Robustness of CNT Via Interconnect Fabricated by Low Temperature Process over a High-Density Current

Akio Kawabata, Shintaro Sato, Tatsuhiro Nozue et al. · 2008 · 31 citations

Nanosheet, Engineering, Electrical Properties +18

Carbon Nanotube Vias Fabricated by Remote Plasma-Enhanced Chemical Vapor Deposition

Masayuki Katagiri, Naoshi Sakuma, Mariko Suzuki et al. · Japanese Journal of Applied Physics · 2008 · 28 citations

Materials Science, Cnt Single Vias, Electrical Engineering +10