Concepedia

F.B. Sperling

FS

4

Publications

228

Citations

4

H-Index

1997

Active since

Affiliations

Philips (Netherlands)(Current)

Delft University of Technology

F.B. Sperling is an author at Philips (Netherlands) specializing in vibration control, mechanical systems, and systems engineering.

Top concepts

EngineeringMechatronicsMotion ControlVibration ControlMechanical SystemsSystems EngineeringControl DesignProcess ControlRoboticsKinematics

Publications per year

1997–2003

4

Publications

4

Multivariable feedback control design for high-precision wafer stage motion

Marc van de Wal, Gregor van Baars, F.B. Sperling · Control Engineering Practice · 2002 · 157 citations

Motion Control, Feedforward Control, Engineering +6

Point-to-point control of a high accuracy positioning mechanism

D. de Roover, F.B. Sperling · 1997 · 35 citations

Engineering, Mechanical Engineering, Field Robotics +20

Point-to-point control of a MIMO servomechanism

D. de Roover, F.B. Sperling, О.H. Bosgra · 1998 · 26 citations

Robot Kinematics, Engineering, Field Robotics +16

Experimentally validated multivariable μ feedback controller design for a high-precision wafer stage

Marc van de Wal, Gregor van Baars, F.B. Sperling · Proceedings of the 40th IEEE Conference on Decision and Control (Cat. No.01CH37228) · 2003 · 10 citations

Engineering, Advanced Mimo Control, Wafer Scale Processing +17

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