Concepedia

Marc van de Wal

MV

18

Publications

876

Citations

14

H-Index

1998

Active since

Affiliations

Eindhoven University of Technology(Current)

Philips (Netherlands)

ASML (Netherlands)

Delft University of Technology

Philips (Finland)

Marc van de Wal is an author at Eindhoven University of Technology specializing in engineering, systems engineering, and mechanical systems.

Top concepts

Publications per year

1998–2018

18

Publications

18

LPV control for a wafer stage: beyond the theoretical solution

Matthijs Groot Wassink, Marc van de Wal, Carsten W. Scherer · Control Engineering Practice · 2004 · 171 citations

, , +3

Connecting System Identification and Robust Control for Next-Generation Motion Control of a Wafer Stage

Tom Oomen, Robbert van Herpen, Sander Quist et al. · IEEE Transactions on Control Systems Technology · 2013 · 162 citations

, , +18

Multivariable feedback control design for high-precision wafer stage motion

Marc van de Wal, Gregor van Baars, F.B. Sperling · Control Engineering Practice · 2002 · 157 citations

, , +6

Model-based feedforward for motion systems

Matthijs Boerlage, M. Steinbuch, PF Paul Lambrechts et al. · 2004 · 72 citations · Full text

, , +14

Exploiting additional actuators and sensors for nano-positioning robust motion control

Robbert van Herpen, Tom Oomen, Edward Kikken et al. · Mechatronics · 2014 · 53 citations

, , +10

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