Statistics
Publications
1
Citations
11
H-Index
1
Active since
2012
Dmitriy A. Chelyubeev is an author specializing in mask fabrication, aerial image printing, and phase-shifting holography.
Publications per year
2012–2012
1
1
Phase-shift at subwavelength holographic lithography (SWHL)
Mikhail V. Borisov, Dmitriy A. Chelyubeev, Vitalij V. Chernik et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 11 citations
Engineering, Manufacturing Engineering, Microfabrication +15
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