Concepedia

Ching-Hwa Chen

CC

4

Publications

81

Citations

4

H-Index

1992

Active since

Affiliations

Lam Research (United States)(Current)

Ching-Hwa Chen is an author at Lam Research (United States) specializing in engineering, applied physics, and electrical engineering.

Top concepts

EngineeringApplied PhysicsMicroelectronicsElectrical EngineeringMaterial ScienceMaterials EngineeringPhysicsPlasma TheoryMicrostructurePlasma Physics

Publications per year

1992–1994

4

Publications

4

Etching of aluminum alloys in the transformer-coupled plasma etcher

Y. Ra, Stephen G. Bradley, Ching-Hwa Chen · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 38 citations

Engineering, Radio Frequency, Plasma Physics +17

Direct current bias as an ion current monitor in the transformer coupled plasma etcher

Y. Ra, Ching-Hwa Chen · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 19 citations

Electrical Engineering, Plasma Electronics, Engineering +11

Electron cycloton resonance etching of aluminum alloys with BCl3–Cl2–N2

William F. Marx, X. Diana, Ching-Hwa Chen · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 12 citations

Materials Science, Materials Engineering, Plasma Electronics +11

High selectivity electron cyclotron resonance etching of submicron polysilicon gate structures

X. Diana, Tsu-An Lin, Ching-Hwa Chen · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 12 citations

Electrical Engineering, Engineering, Polysilicon Etch +14

Rows per page

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