Concepedia
Statistics
Publications
9
Citations
273
H-Index
Active since
2012
Affiliations
Delft University of Technology(Current)
ASML (Netherlands)
VSL Dutch Metrology Institute
S. Roy is an author at Delft University of Technology specializing in engineering, microscopy, and physics.
Top concepts
EngineeringPhysicsMicroscopyApplied PhysicsOptical PropertiesPhotonicsSpectroscopyInterferometryNatural SciencesNanophotonics
Publications per year
2012–2017
Radially Polarized Light for Detection and Nanolocalization of Dielectric Particles on a Planar Substrate
S. Roy, K. N. Ushakova, Quincy Y. van den Berg et al. · Physical Review Letters · 2015 · 66 citations · Full text
Engineering, Nano-optics, Microscopy +20
Reconstruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier scatterometry
Nitish Kumar, P. Petrík, Gopika K. P. Ramanandan et al. · Optics Express · 2014 · 63 citations · Full text
Coherent Fourier scatterometry for detection of nanometer-sized particles on a planar substrate surface
S. Roy, Alberto C. Assafrao, Silvania F. Pereira et al. · Optics Express · 2014 · 28 citations · Full text
Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem
S. Roy, Nitish Kumar, Silvania F. Pereira et al. · Journal of Optics · 2013 · 24 citations · Full text
Engineering, Microscopy, Optical Testing +21
Coherent Fourier scatterometry: tool for improved sensitivity in semiconductor metrology
Nitish Kumar, Omar El Gawhary, S. Roy et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 21 citations
Engineering, Measurement, Optical Testing +19
1–5 of 9