Statistics
Publications
10
Citations
424
H-Index
10
Active since
1976
Affiliations
U. C. Sridharan is an author at University of Pittsburgh specializing in engineering, chemistry, and chemical kinetics.
Publications per year
1976–2016
10
10
Low temperature etch chuck: Modeling and experimental results of heat transfer and wafer temperature
Dylan Wright, Dennis C. Hartman, U. C. Sridharan et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 39 citations
Experimental Results, Electrical Engineering, Engineering +15
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