4
Publications
94
Citations
4
H-Index
1977
Active since
Affiliations
Dennis C. Hartman is an author at Lawrence Berkeley National Laboratory specializing in engineering, chemistry, and natural sciences.
Top concepts
EngineeringPhysicsChemistryNatural SciencesSpectroscopyPhotochemistryQuantum ChemistryPhysical ChemistryCatalysisBiophysics
Publications per year
1977–1992
4
4
Low temperature etch chuck: Modeling and experimental results of heat transfer and wafer temperature
Dylan Wright, Dennis C. Hartman, U. C. Sridharan et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 39 citations
Experimental Results, Electrical Engineering, Engineering +15
Rows per page
1–4 of 4