Concepedia

B. S. Kwon

BS

Statistics

Publications

3

Citations

43

H-Index

3

Active since

2008

Affiliations

Sungkyunkwan University(Current)

B. S. Kwon is an author at Sungkyunkwan University specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceOptoelectronicsMicroelectronicsMicrofabricationElectrical EngineeringChemistryNanoelectronics

Publications per year

2008–2009

3

Publications

3

Etching characteristics and application of physical-vapor-deposited amorphous carbon for multilevel resist

H. T. Kim, B. S. Kwon, Nae‐Eung Lee et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2008 · 18 citations

Engineering, Siox Hard Mask, Plasma Processing +18

Highly selective etching of silicon nitride to physical-vapor-deposited a-C mask in dual-frequency capacitively coupled CH2F2∕H2 plasmas

J. S. Kim, B. S. Kwon, W. Heo et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2009 · 13 citations

Selective Etching, Engineering, Ch2f2∕h2 Plasmas +17

Etching Characteristics of ZnO and Al-Doped ZnO in Inductively Coupled Cl<sub>2</sub>/CH<sub>4</sub>/H<sub>2</sub>/Ar and BCl<sub>3</sub>/CH<sub>4</sub>/H<sub>2</sub>/Ar Plasmas

Hack Joo Lee, B. S. Kwon, Hyun Woo Kim et al. · Japanese Journal of Applied Physics · 2008 · 12 citations

Materials Science, Chemical Engineering, Plasma Electronics +14

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