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J. S. Kim

JS

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Publications

1

Citations

13

H-Index

1

Active since

2009

Affiliations

Jusung Engineering (South Korea)(Current)

J. S. Kim is an author at Jusung Engineering (South Korea) specializing in electrical engineering, microelectronics, and optoelectronics.

Top concepts

Publications per year

2009–2009

1

Publications

1

Highly selective etching of silicon nitride to physical-vapor-deposited a-C mask in dual-frequency capacitively coupled CH2F2∕H2 plasmas

J. S. Kim, B. S. Kwon, W. Heo et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2009 · 13 citations

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