Y. H. Lee

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Active since

1995

Affiliations

IBM Research - Thomas J. Watson Research Center(Current)

Y. H. Lee is an author at IBM Research - Thomas J. Watson Research Center specializing in deep ultraviolet lithography, etching processes, and microfabrication.

Publications per year

1995–1995

Publications

Lithography and fabrication processes for sub-100 nm scale complementary metal–oxide semiconductor

Shalom J. Wind, Y. Taur, Y. H. Lee et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 17 citations

Engineering, Electrical Engineering, Materials Science +17

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