Concepedia

Marcos J. Barela

MJ

Statistics

Publications

8

Citations

396

H-Index

8

Active since

2001

Affiliations

University of New Mexico(Current)

University of Maryland, College Park

Marcos J. Barela is an author at University of New Mexico specializing in materials science, materials engineering, and natural sciences.

Publications per year

2001–2005

8

Publications

8

Fluorocarbon-based plasma etching of SiO2: Comparison of C4F6/Ar and C4F8/Ar discharges

Xi Li, Xuefeng Hua, Ling Li et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 115 citations

Natural Sciences, Materials Engineering, Materials Science +16

Effects of Ar and O2 additives on SiO2 etching in C4F8-based plasmas

Li Xi, Ling Li, Xuefeng Hua et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 106 citations

Natural Sciences, Materials Engineering, Materials Science +15

Role of C2F4, CF2, and ions in C4F8∕Ar plasma discharges under active oxide etch conditions in an inductively coupled GEC cell reactor

Marcos J. Barela, H. Anderson, G. S. Oehrlein · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005 · 36 citations

Natural Sciences, Materials Science, Physics +15

Growth of Patterned Nanopore Arrays of Anodic Aluminum Oxide

J. Yan, G. V. Rama Rao, Marcos J. Barela et al. · Advanced Materials · 2003 · 35 citations

Natural Sciences, Materials Engineering, Materials Science +11

Fabrication of Anisotropic Super Hydrophobic/Hydrophilic Nanoporous Membranes by Plasma Polymerization of C[sub 4]F[sub 8] on Anodic Aluminum Oxide

Dmitri A. Brevnov, Marcos J. Barela, Matthew J. Brooks et al. · Journal of The Electrochemical Society · 2004 · 33 citations

Engineering, Materials Engineering, Materials Science +16

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