Growth of Patterned Nanopore Arrays of Anodic Aluminum Oxide

Abstract

An inexpensive procedure to fabricate highly ordered , patterned through‐hole nanopore arrays of anodic aluminum oxide (AAO, see Figure) with intermittent aluminum supports has been developed. Silica was used as the anodization barrier. Using a two‐step anodization process, straight nanopores of AAO are formed in the unpatterned areas; no pores are found in the patterned areas.