Concepedia

Toshiaki Yanagihara

TY

Statistics

Publications

1

Citations

17

H-Index

1

Active since

2003

Affiliations

Toppan (Japan)(Current)

Toshiaki Yanagihara is an author at Toppan (Japan) specializing in etching, semiconductor devices, and mask proximity effect correction.

Publications per year

2003–2003

1

Publications

1

Mask CD uniformity improvement by dry etching loading effect correction

Jun Kotani, Toshiaki Yanagihara, Eiji Umeda et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 17 citations

, , +10

1–1 of 1