Concepedia

R. K. Sampson

RK

3

Publications

41

Citations

3

H-Index

1993

Active since

Affiliations

Duke University(Current)

University of North Carolina at Chapel Hill

R. K. Sampson is an author at Duke University specializing in instrumentation, applied physics, and engineering.

Top concepts

EngineeringApplied PhysicsInstrumentationOptical MaterialsThin FilmsHeat TransferThermal PhysicsMaterial ScienceMicrofabricationOptical Properties

Publications per year

1993–1993

3

Publications

3

Simultaneous Silicon Wafer Temperature and Oxide Film Thickness Measurement in Rapid‐Thermal Processing Using Ellipsometry

R. K. Sampson, K. A. Conrad, E. A. Irene et al. · Journal of The Electrochemical Society · 1993 · 17 citations

Optical Materials, Engineering, Situ Technique +18

Ellipsometric monitoring and control of the rapid thermal oxidation of silicon

K. A. Conrad, R. K. Sampson, Hisham Z. Massoud et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 14 citations

Optical Materials, Engineering, Thin Film Process Technology +18

Resolution of Silicon Wafer Temperature Measurement by In Situ Ellipsometry in a Rapid Thermal Processor

R. K. Sampson, Hisham Z. Massoud · Journal of The Electrochemical Society · 1993 · 10 citations

Optical Materials, Ellipsometric Measurement, Engineering +25

Rows per page

1–3 of 3