Concepedia

R.L. Deaton

RD

Statistics

Publications

3

Citations

70

H-Index

3

Active since

1973

Affiliations

Duke University(Current)

R.L. Deaton is an author at Duke University specializing in rapid thermal oxidation, heat transfer, and materials engineering.

Publications per year

1973–1992

3

Publications

3

Self-diffusion of oxygen in 238PuO2

R.L. Deaton, C.J. Wiedenheft · Journal of Inorganic and Nuclear Chemistry · 1973 · 29 citations

, , +8

Manufacturability of rapid-thermal oxidation of silicon: oxide thickness, oxide thickness variation, and system dependency

R.L. Deaton, Hisham Z. Massoud · IEEE Transactions on Semiconductor Manufacturing · 1992 · 21 citations

, , +17

Effect of thermally induced stresses on the rapid-thermal oxidation of silicon

R.L. Deaton, Hisham Z. Massoud · Journal of Applied Physics · 1991 · 20 citations

, , +17

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