O. Than

Simulation of anisotropic chemical etching of crystalline silicon using a cellular automata model

O. Than, S. Büttgenbach · Sensors and Actuators A Physical · 1994 · 93 citations

Engineering, Computer Engineering, Materials Engineering +16

SUZANA: a 3D CAD tool for anisotropically etched silicon microstructures

S. Büttgenbach, O. Than · 1996 · 14 citations

Engineering, Computer Engineering, Manufacturing Engineering +17

<title>Efficient process development for bulk silicon etching using cellular automata simulation techniques</title>

James Marchetti, Yie He, O. Than et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1998 · 13 citations

Engineering, Manufacturing Engineering, Materials Science +17

SUZANA: a 3D CAD tool for anisotropically etched silicon microstructures

S. Büttgenbach, O. Than · 2002 · 11 citations

Engineering, Computer Engineering, Manufacturing Engineering +17

BICEPS: a modular environment for the design of micromachined silicon devices

Lars Steffensen, O. Than, S. Büttgenbach · Sensors and Actuators A Physical · 2000 · 10 citations

Engineering, Electrical Engineering, Mechanical Engineering +14