O. Than

Simulation of anisotropic chemical etching of crystalline silicon using a cellular automata model

O. Than, S. Büttgenbach · Sensors and Actuators A Physical · 1994 · 93 citations

Materials Science, Materials Engineering, Crystalline Silicon +13

SUZANA: a 3D CAD tool for anisotropically etched silicon microstructures

S. Büttgenbach, O. Than · European Design and Test Conference · 1996 · 14 citations

Engineering, Mechanical Engineering, Computer-aided Design +20

<title>Efficient process development for bulk silicon etching using cellular automata simulation techniques</title>

James Marchetti, Yie He, O. Than et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1998 · 13 citations

Engineering, Computer-aided Design, Silicon On Insulator +18

SUZANA: a 3D CAD tool for anisotropically etched silicon microstructures

S. Büttgenbach, O. Than · 2002 · 11 citations

Engineering, Mechanical Engineering, Computer-aided Design +20

BICEPS: a modular environment for the design of micromachined silicon devices

Lars Steffensen, O. Than, S. Büttgenbach · Sensors and Actuators A Physical · 2000 · 10 citations

Micromachined Silicon Devices, Modular Environment, Engineering +9