Concepedia

R.L. Inglebert

RI

7

Publications

188

Citations

7

H-Index

1973

Active since

Affiliations

Centre National de la Recherche Scientifique(Current)

R.L. Inglebert is an author at Centre National de la Recherche Scientifique specializing in engineering, applied physics, and materials science.

Top concepts

Publications per year

1973–2008

7

Publications

7

Ion flux composition in HBr/Cl2/O2 and HBr/Cl2/O2/CF4 chemistries during silicon etching in industrial high-density plasmas

G. Cunge, R.L. Inglebert, O. Joubert et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 68 citations · Full text

, , +18

Secondary ion and Auger electron emissions from Ar+-ion-sputtered FeAl alloys

J.-F. Hennequin, R.L. Inglebert, P. Viaris de Lesegno · Surface Science · 1984 · 34 citations

Experimental study on the acceptance of a quadrupole mass filter

J.-F. Hennequin, R.L. Inglebert · International Journal of Mass Spectrometry and Ion Physics · 1978 · 25 citations

, , +1

Spectroscopic studies of plasmonic interactions in colloidal dimers fabricated by convective-capillary force assembly

T. Rivera, O. Lecarme, Jürgen Hartmann et al. · Microelectronic Engineering · 2008 · 19 citations

, , +9

Relaxation of rare earth and cobalt ions in polycrystalline yttrium iron garnet

R.L. Inglebert, Jean Nicolas · IEEE Transactions on Magnetics · 1974 · 15 citations

, , +21

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