Statistics
Publications
1
Citations
21
H-Index
1
Active since
2008
Affiliations
Renesas Electronics (Japan)(Current)
Takao Kamoshima is an author at Renesas Electronics (Japan) specializing in recycling, surface science, and materials engineering.
Publications per year
2008–2008
1
1
Takao Kamoshima, Yasuhisa Fujii, Toshimitsu Noguchi et al. · IEEE Transactions on Semiconductor Manufacturing · 2008 · 21 citations
Engineering, Dual-damascene Patterning, Chemical Deposition +17
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