Concepedia

D. G. Stearns

DG

4

Publications

204

Citations

4

H-Index

1993

Active since

Affiliations

Lawrence Livermore National Laboratory(Current)

D. G. Stearns is an author at Lawrence Livermore National Laboratory specializing in physics, nanotechnology, and applied physics.

Top concepts

PhysicsEngineeringNanotechnologyApplied PhysicsSurface ScienceMaterial ScienceThin FilmsNanomaterialsNanoelectronicsMicroelectronics

Publications per year

1993–2001

4

Publications

4

Multilayer mirror technology for soft-x-ray projection lithography

D. G. Stearns, R. S. Rosen, S. P. Vernon · Applied Optics · 1993 · 124 citations

Investigating the growth of localized defects in thin films using gold nanospheres

Paul B. Mirkarimi, D. G. Stearns · Applied Physics Letters · 2000 · 45 citations

Materials Science, Engineering, Physics +15

An ion-assisted Mo-Si deposition process for planarizing reticle substrates for extreme ultraviolet lithography

Paul B. Mirkarimi, Eberhard Spiller, D. G. Stearns et al. · IEEE Journal of Quantum Electronics · 2001 · 25 citations

Engineering, Electron-beam Lithography, Silicon On Insulator +17

Technique employing gold nanospheres to study defect evolution in thin films

Paul B. Mirkarimi, Sherry L. Baker, D. G. Stearns · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 10 citations

Engineering, Colloidal Nanocrystals, Metallic Nanomaterials +17

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