C. Maillot

The thermal oxidation of silicon the special case of the growth of very thin films

F. Rochet, S. Rigo, M. Froment et al. · Advances In Physics · 1986 · 127 citations

Natural Sciences, Materials Engineering, Materials Science +16

Thermal nitridation of silicon: An XPS and LEED investigation

C. Maillot, H. Roulet, G. Dufour · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1984 · 101 citations

Natural Sciences, Materials Engineering, Materials Science +17

Chemical vapor deposition of tungsten oxides: A comparative study by X-ray photoelectron spectroscopy, X-ray diffraction and reflection high energy electron diffraction

B. Yous, Stéphane Robin, A. Donnadieu et al. · Materials Research Bulletin · 1984 · 40 citations

Natural Sciences, Materials Engineering, Materials Science +15

Structural evolution of very thin silicon oxide films during thermal growth in dry oxygen

B. Agius, S. Rigo, F. Rochet et al. · Applied Physics Letters · 1984 · 35 citations

Natural Sciences, Materials Engineering, Materials Science +16

Study of atomic transport mechanisms during thermal nitridation of silicon in ammonia using 15N and D labelled gas

C. Maillot, H. Roulet, G. Dufour et al. · Applied Surface Science · 1986 · 31 citations

Engineering, Materials Engineering, Materials Science +14