10
Publications
225
Citations
10
H-Index
1999
Active since
Affiliations
V. V. Starkov is an author at Institute of Microelectronics Technology and High Purity Materials specializing in engineering, microfabrication, and materials science.
Top concepts
EngineeringMicrofabricationMaterial ScienceApplied PhysicsSurface ScienceMicroelectronicsPhysicsSelf-assemblyMicrostructureMedicine
Publications per year
1999–2018
10
10
Porous silicon for micro-sized fuel cell reformer units
H. Presting, J. Konle, V. V. Starkov et al. · Materials Science and Engineering B · 2004 · 49 citations
Short-focus silicon parabolic lenses for hard X-rays
V. V. Aristov, V. V. Starkov, Leonid Shabel'nikov et al. · Optics Communications · 1999 · 20 citations
SU8 photoresist as an etch mask for local deep anodic etching of silicon
V. V. Starkov, E. Yu. Gavrilin, J. Konle et al. · physica status solidi (a) · 2003 · 18 citations
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